ME 893, MEMS and NEMS Sensors and Actuators,
A totally new graduate-level course developed at Clemson University:
Topics of the course include: fundamental concepts as well as recent advances in micro/nano-sensors and actuators design and implementation, methods for micro- and nano-scale sensors and actuators fabrication and characterization, overview of testing apparatus and required experimental setups for todays demanding applications in both MEMS and NEMS.
Topical Course Outline:
Part I: Micro/Nanosystems Design and Working Principles
- Introduction and Background: Introduction and Familiarization, Overview of Micro/Nano Systems.
- Working Principles of Micro/nanosystems: Micro/nanosensors, Micro/nanoactuation, Example Case Studies.
- Introduction to Engineering Science for Microsystems Design and Fabrication: Doping Principles of Semiconductor, Electrochemistry and Quantum Physics.
- Engineering Mechanics for Microsystems Design: Mechanical Vibration, Thermomechanics, Fracture Mechanics and FEA.
- Thermofluid Engineering for Microsystems Design: Introduction to Fluid Mechanics, Fluid Dynamics, and Overview of Heat Conduction.
- Scaling Laws in Miniaturization: Scaling in Geometry, Rigid-Body Dynamics, Electrostatic Forces, Fluid Mechanics, etc.
- Materials Selection for Micro/Nano-Systems: Substrates and Wafers, Silicon Compounds, Piezoelectric Crystals, Polymers and Films.
- Overview of Micro/Nano-Systems Fabrication Process: Photolithography, Oxidation, CVD, Etching, Bulk Micromanufacturing, LIGA Process.
- Microsystems Design and Example Case Studies: Design Considerations, Process Design, Microsystems Design Example Case Studies.
- Introduction to Nanotechnology: Physics in Nanoscopic World and Scaling, Representative Nanomaterial-based Products
Part II: Recent Advances in MEMS/NEMS Sensors and Actuators
- Dynamics and Control of Micro/Nano-Systems: Dynamics and Control of Micro/nano-Structures, Design at Micro/Nano-Scale.
- Medical Diagnostic and Biosensing via Nanotechnology: Multifunctional Biomaterials, Actuators/Sensors for use in Medical Instruments.
- Piezoelectric-based Micro/nanopositioning and Micro/nanomanipulation: Precision Manufacturing and Nanomanufacturing, SPM and Atomic Force Microscopy.
- Nanomechanical Cantilever Sensors and Actuators: PZT-driven Micro/nanocantilevers, Piezo-AFM, Nanomechanical Cantilever Sensors.
- Nanomaterials-based Actuators and Sensors: Nanotube-based Sensors and Actuators, Active Polymeric Transducers, E-Textiles.
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