{"id":2662,"date":"2024-11-25T12:50:58","date_gmt":"2024-11-25T17:50:58","guid":{"rendered":"https:\/\/cecas.clemson.edu\/~rodrigm\/?page_id=2662"},"modified":"2024-11-25T12:50:58","modified_gmt":"2024-11-25T17:50:58","slug":"carbon-mems-from-su-8-photoresist","status":"publish","type":"page","link":"https:\/\/cecas.clemson.edu\/~rodrigm\/carbon-mems-from-su-8-photoresist\/","title":{"rendered":"Carbon MEMS from SU-8 photoresist"},"content":{"rendered":"\n<p><\/p>\n\n\n\n<p>S. Muhamed &#8220;<a href=\"https:\/\/tigerprints.clemson.edu\/all_theses\/3002\/\" target=\"_blank\" rel=\"noreferrer noopener\">Assessing Temperature Differences on a sample heated in a tube furnace under vacuum<\/a>&#8221; MS Thesis, Mechanical Engineering, Clemson University&nbsp; (2018).<\/p>\n\n\n\n<p>R. Natu, M. Islam, J. Gilmore&nbsp;and R. Martinez-Duarte, \u201c<a href=\"https:\/\/www.sciencedirect.com\/science\/article\/pii\/S0165237017309798\" target=\"_blank\" rel=\"noreferrer noopener\">Shrinkage of SU-8 microstructures during carbonization<\/a>\u201d <em>Journal of Analytical and Applied Pyrolysis<\/em>, 131, 17-27 (2018).&nbsp; <a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2018\/03\/Accepted-Manuscript-Shrinkage-of-SU-8.pdf\">Accepted Manuscript<\/a><\/p>\n\n\n\n<p>E. Giogli, &#8220;<a href=\"http:\/\/tigerprints.clemson.edu\/all_theses\/2555\/\" target=\"_blank\" rel=\"noreferrer noopener\">Fabricating Suspended Carbon Structures Using SU-8 Photolithography<\/a>&#8221; MS, Mechanical Engineering, Clemson University (2016).&nbsp; <a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2016\/02\/Fabricating-Suspended-Carbon-Structures-Using-SU-8-Photolithograp-Giogli.pdf\">PDF<\/a><\/p>\n\n\n\n<p>R. Natu, M. Islam&nbsp;and R. Martinez-Duarte, \u201c<a href=\"http:\/\/ecst.ecsdl.org\/content\/72\/1\/27.short\" target=\"_blank\" rel=\"noreferrer noopener\">Shrinkage Analysis of Carbon Micro Structures Derived from SU-8 Photoresist<\/a>\u201d. <em>ECS Transactions, <\/em>72 (1), 27-33 (2016).&nbsp;<a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2016\/02\/SHRINKAGE-ANALYSIS-FOR-CARBON-MICRO-STRUCTURES.pdf\">Accepted Manuscript<\/a><\/p>\n\n\n\n<p>E. Giogli, M. Islam&nbsp;and R. Martinez-Duarte, \u201c<a href=\"http:\/\/ecst.ecsdl.org\/content\/72\/1\/125.short\" target=\"_blank\" rel=\"noreferrer noopener\">Fabricating Suspended Carbon Wires Using SU-8 Photolithography<\/a>\u201d. <em>ECS Transactions,<\/em> 72 (1), 125-134 (2016)&nbsp;<a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2016\/02\/ECS-Trans.-2016-Giogli-125-34.pdf\">Accepted Manuscript<\/a><\/p>\n\n\n\n<p>T. Benavidez, R. Martinez-Duarte and C. Garcia, \u201c<a href=\"http:\/\/pubs.rsc.org\/en\/content\/articlelanding\/2016\/ay\/c6ay00293e#!divAbstract\" target=\"_blank\" rel=\"noreferrer noopener\">Analytical Methodologies Using Carbon Substrates developed by Pyrolysis<\/a>\u201d <em>Analytical Methods, <\/em>8, 4163-4176(2016). Invited Review. Front Cover.<\/p>\n\n\n\n<p>R. Martinez-Duarte, \u201c<a href=\"http:\/\/www.mdpi.com\/2072-666X\/5\/3\/766\" target=\"_blank\" rel=\"noreferrer noopener\">SU-8 Photolithography as a Toolbox for Carbon MEMS<\/a>\u201d. <em>Micromachines,<\/em> 5, (3), 766-782 (2014). <a href=\"http:\/\/www.mdpi.com\/journal\/micromachines\/special_issues\/mems_material\" target=\"_blank\" rel=\"noreferrer noopener\">Invited Review published in the special issue: 15 years of SU-8 as MEMS material.<\/a>&nbsp;Open Access<\/p>\n\n\n\n<p>J. Schroers, G. Kumar, M. Madou and R. Martinez-Duarte, \u201c<a href=\"http:\/\/www.google.com\/patents\/US20120125071\" target=\"_blank\" rel=\"noreferrer noopener\">Carbon molds for use in the Fabrication of Bulk Metallic Glasses Parts and Molds<\/a>\u201d WO\/2010\/111701, US 2012\/0125071 A1.<\/p>\n\n\n\n<p><a>J.-I. Heo, D.-S. Shim, R. Martinez-Duarte, M. Madou and H. Shin, \u201c3-D Carbon Interdigitated Array Nanoelectrodes for sensing neurotransmitters\u201d <em>Proceedings of microTAS; <\/em>Gronigen, The Netherlands (10\/2010).<\/a><\/p>\n\n\n\n<p>R. Martinez-Duarte, G. Turon Teixidor, P. Mukherjee, Q. Kang and M. J. Madou,<br>\u201c<a href=\"http:\/\/link.springer.com\/chapter\/10.1007%2F978-1-4419-1543-6_5\" target=\"_blank\" rel=\"noreferrer noopener\">Perspectives of Micro and Nanofabrication of Carbon for Electrochemical and Microfluidic Applications<\/a>&#8221; in <a href=\"http:\/\/link.springer.com\/book\/10.1007\/978-1-4419-1543-6\" target=\"_blank\" rel=\"noreferrer noopener\">Microfluidics and Microfabrication<\/a> edited by S. Chakraborty, <em>Springer<\/em>, 181-263 (2009).&nbsp;<a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2016\/02\/Perspectives-of-Micro-and-Nanofab-of-carbon-for-EC-and-Microfluidics-Martinez-Duarte-et-al.pdf\">PDF<\/a><\/p>\n\n\n\n<p>R. Martinez-Duarte &#8220;Fabrication of Carbon Micro Molds&#8221;, MS, Mechanical and Aerospace Engineering, University of California, Irvine (2009). <a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-content\/uploads\/2016\/02\/Fabrication-of-Carbon-Micro-Molds-RMD.pdf\">PDF<\/a><\/p>\n\n\n\n<p><a>R. Martinez-Duarte, M. J. Madou, G. Kumar and J. Schroers, &#8220;A novel method for Amorphous Metal Micromolding using Carbon MEMS&#8221; <em>Proceedings of Transducers<\/em>: Denver, CO (06\/2009).<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>S. Muhamed &#8220;Assessing Temperature Differences on a sample heated in a tube furnace under vacuum&#8221; MS Thesis, Mechanical Engineering, Clemson University&nbsp; (2018). R. Natu, M. Islam, J. Gilmore&nbsp;and R. Martinez-Duarte, \u201cShrinkage of SU-8 microstructures during carbonization\u201d Journal of Analytical and Applied Pyrolysis, 131, 17-27 (2018).&nbsp; Accepted Manuscript E. Giogli, &#8220;Fabricating Suspended Carbon Structures Using SU-8 &hellip; <a href=\"https:\/\/cecas.clemson.edu\/~rodrigm\/carbon-mems-from-su-8-photoresist\/\" class=\"more-link\">Continue reading <span class=\"screen-reader-text\">Carbon MEMS from SU-8 photoresist<\/span> <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":12,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-2662","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/pages\/2662","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/comments?post=2662"}],"version-history":[{"count":1,"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/pages\/2662\/revisions"}],"predecessor-version":[{"id":2664,"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/pages\/2662\/revisions\/2664"}],"wp:attachment":[{"href":"https:\/\/cecas.clemson.edu\/~rodrigm\/wp-json\/wp\/v2\/media?parent=2662"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}